George Gomba | Source | Vice President at ASML
George Gomba
Vice President at ASML
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ASML
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Challenges, Defects in 5nm EUV - EE Times Asia
Differing forecasts on 5nm EUV manufacturing process as Imec researchers uncover random defects
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It’s been a lot of hard work, and there’s a lot more hard work to come. Today’s NXE 3400 systems are not meeting some road map conditions we desire, so there is still some uncertainty [at 7nm]. If we do not make productivity and availability improvements, we may only be able to use EUV for the most aggressive processors
